By Topic

Remote-powered high-performance strain sensing microsystem

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
M. Suster ; Dept. of EECS, Case Western Reserve Univ., Cleveland, OH, USA ; N. Chaimanonart ; J. Guo ; W. H. Ko
more authors

This paper presents an RF remote-powered high-performance strain sensing microsystem. A MEMS capacitive strain sensor converts an input strain to a capacitance change, followed by low-noise integrated sensing electronics converting the capacitive signal to an output voltage with an overall sensitivity of 420 μV/με. An RF to DC converter based on inductive coupled coils converts a 50 MHz AC signal to a stable DC supply of 2.8 V with a current driving capability of 2 mA, sufficient to power the interface sensing electronics. The prototype microsystem achieves a minimum detectable strain of 0.09 HE over a 10 kHz bandwidth with a dynamic range of 81 dB. The sensing electronics consume 1.5 mA from a 2.8 V supply.

Published in:

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

Date of Conference:

30 Jan.-3 Feb. 2005