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A ground shielded low loss transmission line using Au-to-Au thermo compressive packaging for RF applications

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5 Author(s)
Tsaur, J. ; National Inst. of Adv. Ind. Sci. & Technol., Tsukuba, Japan ; Kobayashi, T. ; Murakosi, Y. ; Maeda, R.
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A ground-shielded transmission line consisting of the suspended signal line and the upper and bottom Au-to-Au packaged ground plates was designed, manufactured and tested. The simulation results indicated that the fully ground-shielded scheme could effectively reduce the signal loss resulted from dielectric coupling loss and radiation loss. The fabricated ground-shielded signal line has demonstrated low transmission loss of 0.37dB/mm up to 50GHz in our experiments, which was less than 0.68dB/mm of the conventional coplanar waveguide.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005