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Tube shape piezoelectric 2D microscanner for minimally invasive laser treatment

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4 Author(s)
Akahori, H. ; Graduate Sch. of Eng., Tohoku Univ., Japan ; Wada, H. ; Esashi, M. ; Haga, Y.

For precise laser treatment in the human body, a 2D (two dimensional) laser scanning micro tool has been developed. The tool is made up of an optical fiber, a micro rod lens and a 2D microscanner. The 2D microscanner has three piezoelectric unimorph cantilevers that have a ball joint at each tip and a mirror. The mirror is supported by a pivot from underside and is inclined by pushing down by three cantilevers on the top of the mirror. The maximum inclined angle of the mirror is about 26 degrees. For insertion the tool into a working channel of a conventional endoscope, these components are packaged into a 3.8-mm-external-diameter polymer tube.

Published in:

Micro Electro Mechanical Systems, 2005. MEMS 2005. 18th IEEE International Conference on

Date of Conference:

30 Jan.-3 Feb. 2005

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