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CMOS-MEMS resonant RF mixer-filters

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6 Author(s)
Fang Chen ; Dept. of Electr. & Comput. Eng., Carnegie Mellon Univ., Pittsburgh, PA, USA ; J. Brotz ; U. Arslan ; Chiung-Cheng Lo
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An integrated CMOS-MEMS micromechanical resonant mixer-filter with potential for application in a single chip receiver is introduced. Air and anchor damping characterization show quality factor greater than 1500. Downconversion and filtering of signal frequencies as high as 3.2 GHz is achieved. This is the highest signal frequency applied so far to MEMS mixer-filters. Analytical calculations match well with the experimental measurements and are used to show that 0 dB mixer conversion loss is achievable. Co-simulation of the MEMS mixer with readout electronics identifies potential solutions to eliminate mixing feedthrough.

Published in:

18th IEEE International Conference on Micro Electro Mechanical Systems, 2005. MEMS 2005.

Date of Conference:

30 Jan.-3 Feb. 2005