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Effect of enhanced hydrostatic pressure at annealing on self- implanted silicon

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5 Author(s)
Misiuk, A. ; Surma, B. ; Bak-Misiuk, J. ; Wnuk, A.
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First Page of the Article

Published in:
Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on

Date of Conference: Oct. 17-21, 2004

Page(s):
171 - 174
Print ISBN:
0-7803-8335-7
Digital Object Identifier :
10.1109/ASDAM.2004.1441186
Product Type:
Conference Publications

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