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Single wafer management systems and bare wafer storage as key to increased yield and productivity

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1 Author(s)
Ritzmann, H. ; Tec-Sem AG, Tagerwilen

The semiconductor industry is the most innovative large-scale industry with respect to level of process technology used and product innovation cycle time. On the other hand, there is still a lot of potential for improvement in the automation area. Improved factory logistics and improved cleanliness can both be achieved by a higher level of systems integration, which means that different individual process steps are performed in a single piece of equipment and by consequent single wafer management. This paper proposes a new approach for wafer storage and wafer sorting which bases on a full integration of these different functions into one single tool

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI

Date of Conference:

11-12 April 2005

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