Cart (Loading....) | Create Account
Close category search window

Single wafer management systems and bare wafer storage as key to increased yield and productivity

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Ritzmann, H. ; Tec-Sem AG, Tagerwilen

The semiconductor industry is the most innovative large-scale industry with respect to level of process technology used and product innovation cycle time. On the other hand, there is still a lot of potential for improvement in the automation area. Improved factory logistics and improved cleanliness can both be achieved by a higher level of systems integration, which means that different individual process steps are performed in a single piece of equipment and by consequent single wafer management. This paper proposes a new approach for wafer storage and wafer sorting which bases on a full integration of these different functions into one single tool

Published in:

Advanced Semiconductor Manufacturing Conference and Workshop, 2005 IEEE/SEMI

Date of Conference:

11-12 April 2005

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.