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Interface a prototyping experiences paving the way to e-manufacturing

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2 Author(s)
H. Wohlwend ; ISMI, Austin, TX ; S. Fulton

Pressure to increase semiconductor manufacturing productivity remains intense. Because productivity gains resulting from larger wafers, smaller device features, and 90% and greater yields are now assumed, equipment utilization and manufacturing effectiveness have become target areas for further improvement. IC makers believe that productivity can be improved significantly by additional equipment and factory data. As a result, ISMI e-manufacturing activities have focused on the acquisition of data to enable factories capable of data-driven, real-time, automated decision-making. IC makers need these types of factories to support shrinking feature sizes and to increase overall factory productivity. This article describes results from prototypes and early production versions of equipment using the new Interface A data port

Published in:

IEEE/SEMI Conference and Workshop on Advanced Semiconductor Manufacturing 2005.

Date of Conference:

11-12 April 2005