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Industrial growth of lithium tetraborate (Li2B4O7) piezocrystal and its SAW applications

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3 Author(s)
Jiayue Xu ; Shanghai Inst. of Ceramics, Chinese Acad. of Sci., Shanghai, China ; Baoliang Lu ; Shiji Fan

Lithium tetraborate Li2B4O7 (LBO) single crystal is a superior substrate material for surface acoustic wave and bulk acoustic wave devices due to its fairly high electromechanical coupling factor and zero temperature coefficient of frequency in [110] plane. In this paper, Bridgman growth of large size LBO crystals is presented from an industrial point of view. The improvements and advantages of the modified Bridgman method are discussed. Mass production of Φ3 4 LBO boules has been realized in our laboratory. The fabrication of SAW devices based on LBO wafers is introduced briefly.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004