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This paper presents the numerical analysis of pull-in voltage for a contact MEMS switch with a couple of electrodes. The lumped-model for double actuated coupled parallel-plate actuators is applied to describe the pull-in phenomenon. And based on the pull-in analysis results, some optimizing approaches are developed to lower the pull-in voltage for a contact MEMS switch.
Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on (Volume:3 )
Date of Conference: 18-21 Oct. 2004