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Research on a seven-wafer Si-based combustor for micro power generation

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4 Author(s)
Jin Yufeng ; Singapore Inst. of Manuf. Technol., Singapore ; Shan Xue Chuan ; Wang Zhenfeng ; Wong, S.

The paper presents preliminary results of our ongoing research program aimed at developing a seven-wafer Si-based combustor for micro power generation. An iterative computing process is developed for both system and components design. Primary results on fabrication of the micro combustor are described. Sealing a Kovar tube to the Si structure of the micro combustor by Kovar-glass-Si bonding is discussed. Instrumentation for testing the combustor is established. A temperature of 955°C near the exit of the combustor was observed.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004

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