By Topic

MEMS- and probe-based mass data storage in conventional CMOS

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

4 Author(s)
M. S. -C. Lu ; Dept. of Electr. Eng., Nat. Tsing Hua Univ., Hsinchu, Taiwan ; Seungook Min ; Shien-Der Tzeng ; S. Gwo

Non-volatile mass data storage using MEMS-based actuation and probe-based read/write has great potential to replace conventional semiconductor memories because of the achieved high areal density. From the standpoint of system implementation, the complexity for integration of all functional electronics in such a micro disk drive is enormously reduced by using CMOS-MEMS as the core implementing technology. In this paper, we present the latest progress in the MRM-based and the EFM-based storage devices that are currently under development.

Published in:

Solid-State and Integrated Circuits Technology, 2004. Proceedings. 7th International Conference on  (Volume:3 )

Date of Conference:

18-21 Oct. 2004