MEMS- and probe-based mass data storage in conventional CMOS

Non-volatile mass data storage using MEMS-based actuation and probe-based read/write has great potential to replace conventional semiconductor memories because of the achieved high areal density. From the standpoint of system implementation, the complexity for integration of all functional electronics in such a micro disk drive is enormously reduced by using CMOS-MEMS as the core implementing technology. In this paper, we present the latest progress in the MRM-based and the EFM-based storage devices that are currently under development.