Analysis of a MEMS gyroscope interface circuit

The interface circuit of a MEMS gyroscope is analyzed in this paper. The gyro works at atmospheric pressure, driven by electronic magnetic force, and sensed by capacitance. The equivalent models of the gyro and the circuits are set. The performance of the gyro system is analyzed and optimized with the model. As a result, the system performance is significantly improved. The gyro's resolution reaches 0.05 /spl deg//s, with full scale value 150 /spl deg//s, scale factor 9.8 mV/( /spl deg//s), nonlinearity 0.43%, and bias drift 3.06/spl deg//s /h.