By Topic

Preparation of ferroelectric Ba(Ti0.85Sn0.15)O3 thin films by metal-organic decomposition

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

8 Author(s)
Miyamoto, T. ; Mater. Technol. Dept., Technol. Res. Inst. of Osaka Prefecture, Japan ; Murakami, S. ; Inoue, K. ; Suzuki, Y.
more authors

Ferroelectric Ba(Ti0.85Sn0.15)O3 (BTS15) thin film is newly prepared on the Pt/Ti/SiO2/Si substrate by metal-organic decomposition. The firing condition is determined by thermogravimetric and differential thermal analysis. The BTS15 thin film with a flat surface and uniform thickness is obtained by spin coating in N2 atmosphere that avoids moisture. The BTS15 film has a perovskite phase and a preferential [110] texture. It is also found that the crystalline structure is cubic at 24°C with a lattice constant of 4.01 Å, and a grain size of about 30 nm was estimated by Scherrer equation and SEM image. From P-E hysteresis loop at 20°C, the polarization at E=0 and the electric field at P=0 are found to be 1.07 μC/cm2 and 24.0 kV/cm, respectively. It is observed that the dielectric constant decreases monotonously from about 830 to 630 with increasing temperature ranging from 20°C to 50°C. Finally, it is found that the BTS15 thin film shows a sufficient ferroelectricity and is an attractive material for functional ferroelectric devices, such as thermal-type infrared sensors.

Published in:

Sensors Journal, IEEE  (Volume:5 ,  Issue: 3 )