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Precision readout circuits for capacitive microaccelerometers

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3 Author(s)
N. Yazdi ; Center of Wireless Integrated Microsystems, Michigan Univ., Ann Arbor, MI, USA ; H. Kulah ; K. Najafi

This paper presents a review of capacitive readout front-end circuits for high-precision accelerometers. The primary design parameters and the trade-offs affecting the resolution are presented. The discussions apply to all capacitive microsensor interfaces. Also, a high-sensitivity capacitive accelerometer interface circuit for hybrid-integration with a surface/bulk micromachined micro-g accelerometer is described. The first generation of the circuit resolves 75 aF of capacitance on ∼120 pF parasitic capacitance with a 200 kHz sampling rate, and the second generation resolves 20 aF with 1 MHz sampling rate. The overall sensor-circuit module has a noise floor of 1.6 μg/√Hz at ambient atmosphere.

Published in:

Sensors, 2004. Proceedings of IEEE

Date of Conference:

24-27 Oct. 2004