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Accurate Simulation of RF MEMS VCO performance including phase noise

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6 Author(s)
Behera, M. ; Sch. of Electr. Eng. & Comput. Sci., Oregon State Univ., Corvallis, OR, USA ; Kratyuk, V. ; De, S.K. ; Aluru, N.R.
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A new coupled circuit and electrostatic/mechanical simulator (COSMO) is presented for the design of low phase noise radio frequency (RF) microelectromechanical systems (MEMS) voltage-controlled oscillators (VCOs). The numerical solution of device level equations is used to accurately compute the capacitance of a MEMS capacitor. This coupled with a circuit simulator facilitates the simulation of circuits incorporating MEMS capacitors. In addition, the noise from the MEMS capacitor is combined with a nonlinear circuit-level noise analysis to determine the phase noise of RF MEMS VCO. Simulations of two different MEMS VCO architectures show good agreement with experimentally observed behavior.

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Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 2 )