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Hybrid-mounted micromachined aluminum hotwires for wall shear-stress measurements

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7 Author(s)
S. Haasl ; Microsystem Technol. Group, R. Inst. of Technol., Stockholm, Sweden ; D. Mucha ; V. Chernoray ; T. Ebefors
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In this paper, we present a micromachined metal hotwire anemometer sensor for use in wall shear-stress measurements. We describe its design and fabrication. A novel hybrid assembly method has been developed to make it possible to measure close to the surface without contacting leads interfering with the flow. Experimental results illustrate the behavior and characteristics of this sensor.

Published in:

Journal of Microelectromechanical Systems  (Volume:14 ,  Issue: 2 )