By Topic

A MEMS conical spring actuator array

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
T. Fukushige ; Dept. of Mechano-Micro Eng., Tokyo Inst. of Technol., Japan ; S. Hata ; A. Shimokohbe

A new MEMS conical spring actuator array is proposed. Previously, we have developed conical spring microactuators having a long stroke (180 μm) in the out-of-plane direction. However, the maximum output force and the packing density were not satisfactory. In the present paper, mechanical and electrical models of a conical spring are described for the calculation of the maximum output force and the driving voltage. Geometrical parameters were optimized using these models and a new geometry for the actuator was derived. The new geometry incorporates a wider and thicker spring that increased the maximum output force from 0.087 mN up to 0.83 mN. The packing density was increased up to 1 actuator/mm2 using an additional interconnect layer. In addition, the driving voltage was decreased using a thinner insulating layer. The use of an ac drive prevented the sticking of the actuator during operation. A detailed investigation of the ac drive was also performed.

Published in:

Journal of Microelectromechanical Systems  (Volume:14 ,  Issue: 2 )