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Optimized motion control system for semiconductor machines

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1 Author(s)

This paper presents Nyquist's compact, rugged NYCe4000 high-end industrial motion control system with flexible and universal integrated drive technology that is suitable for servo and stepper motors up to 500 W. Thanks to the use of the "clean PC" concept, there is no need for extra network cards for real-time kernel extensions. The system's architecture is dominated by the high-performance machine requirements of semiconductor machines. Features are available for debugging and monitoring synchronized, multitasking machine control applications. The NYCe4000 provides high-end motion control performance with complete tooling support.

Published in:

IEEE Control Systems  (Volume:25 ,  Issue: 2 )