By Topic

Resonant-wavelength tuning of microring filters by oxygen plasma treatment

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

3 Author(s)
Tzyy-Jiann Wang ; Inst. of Electro-Opt. Eng., Nat. Taipei Univ. of Technol., Taiwan ; Yen-Hao Huang ; Hsuen-Li Chen

The resonant-wavelength tuning of integrated-optic microring filters in silicon nitride using oxygen plasma treatment is demonstrated. During the treatment, high-energy oxygen ions in the plasma enter into the device surface such that the material composition is converted to SiOxNy. The corresponding index variation results in a modification of the effective index of the guide mode and, therefore, the tuning of the resonant wavelength of microring filters. The effects of treatment parameters, such as radio-frequency power, oxygen flow rate, and treatment time, on the characteristics of microring filters are discussed. Experimental results show that the resonant wavelengths of microring filters can be effectively tuned over a range larger than their free spectral ranges.

Published in:

Photonics Technology Letters, IEEE  (Volume:17 ,  Issue: 3 )