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Browse Journals & Magazines > Semiconductor Manufacturing, ...> Volume:18 Issue:1 Help

Guest Editorial Special Section on Materials-Related Manufacturing Issues in the Nanochip Era

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6 Author(s)
Singh, R. ; Tyagi, S. ; Shimazaki, A. ; Claeys, C.L.
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Published in:
Semiconductor Manufacturing, IEEE Transactions on  (Volume:18 ,  Issue: 1 )

Date of Publication: Feb. 2005

Page(s):
1 - 4
ISSN :
0894-6507
Digital Object Identifier :
10.1109/TSM.2004.841835
Product Type:
Journals & Magazines
Date of Current Version :
14 February 2005
Issue Date :
Feb. 2005
Sponsored by :
IEEE Components, Packaging and Manufacturing Technology Society

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