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Plastic micropump with ferrofluidic actuation

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6 Author(s)
Yamahata, C. ; Inst. of Microelectron. & Microsystems, Swiss Fed. Inst. of Technol. Lausanne, Switzerland ; Chastellain, M. ; Parashar, V.K. ; Petri, A.
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We present the realization and characterization of a new type of plastic micropump based on the magnetic actuation of a magnetic liquid. The pump consists of two serial check-valves that convert the periodic motion of a ferrofluidic plug into a pulsed quasi-continuous flow. The ferrofluid is actuated by the mechanical motion of an external NdFeB permanent magnet. The water-based ferrofluid is synthesized in-house using a coprecipitation method and has a saturation magnetization of 32 mT. The micropump consists of various layers of polymethylmethacrylate (PMMA), which are microstructured by powder blasting or by standard mechanical micromachining techniques, and are assembled in a single plastic structure using a monomer gluing solution. Two soft silicone membranes are integrated in the microfluidic structure to form two check-valves. Water has been successfully pumped at flow rates of up to 30 μL/min and pumping is achieved at backpressures of up to 25 mbar.

Published in:

Microelectromechanical Systems, Journal of  (Volume:14 ,  Issue: 1 )