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New low temperature poly-silicon fabrication technique by near infrared femto-second laser annealing

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4 Author(s)
Yi-Chao Wang ; Inst. of Electro-Opt. Eng., Nat. Chiao Tung Univ., Hsinchu, Taiwan ; Zaitsev, A.K. ; Ci-Ling Pan ; Jia-Min Shieh

Combining ultrafast Ti:sapphire laser pulses and the sequential lateral solidification technique, we achieved films with large grains, wide laser-fluence window, at lower temperatures, than conventional annealing methods.

Published in:

Lasers and Electro-Optics, 2004. (CLEO). Conference on  (Volume:2 )

Date of Conference:

16-21 May 2004