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The accurate modeling of an on-chip inductor is required to achieve high speed, low power, and low noise in radio-frequency integrated circuits. However, the conventional inductor model has a measurable discrepancy in practice since the current flowing in a substrate is not correctly considered. In this paper, an accurate subcircuit model is proposed for an on-chip inductor with a new substrate network to consider losses generated in both vertical and horizontal directions. The proposed model gives an intelligent explanation of the reduction in equivalent resistance between terminals with increasing frequency. The simulation results show good agreement with the measurement over self-resonance frequency using the proposed inductor model.