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Virtual control - a virtual cluster tool for testing and verifying a cluster tool controller and a scheduler

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2 Author(s)
Yong-Jae Joo ; Dept. of Ind. Eng., Korea Adv. Inst. of Sci. & Technol., Daejon, South Korea ; Tae-Eog Lee

In this paper, a systematic practice for verifying a scheduler and a CTC using a virtual cluster tool (VCT) model are presented, which emulates the operational behavior of a real cluster tool with high fidelity. The model architecture and modeling strategies of the VCT were also explained. This paper also presented the use of a formal model-based automatic error-detection technique and discussed experiences of verifying a real cluster tool controller using the VCT.

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IEEE Robotics & Automation Magazine  (Volume:11 ,  Issue: 3 )