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Replicated optical MEMS in sol-gel materials

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4 Author(s)
S. Obi ; Photonics Div., Swiss Center for Electron. & Microtechnology, Zurich, Switzerland ; M. T. Gale ; C. Gimkiewicz ; S. Westenhofer

Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as microlenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost high-resolution mass-production technology. This paper describes progress in work aimed at investigating the potential of this approach.

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IEEE Journal of Selected Topics in Quantum Electronics  (Volume:10 ,  Issue: 3 )