Referenced Items are not available for this document.
Replication technology using sol-gel materials offers an interesting alternative to the current approach to optical microelectromechanical systems (MEMS) fabricated in silicon using lithographic and micromachining technologies. The use of UV-curable sol-gel materials enables optical features such as microlenses and diffractive optical elements to be fabricated in the same process step as the MEMS structures, and has the potential of low-cost high-resolution mass-production technology. This paper describes progress in work aimed at investigating the potential of this approach.
Published in:
Selected Topics in Quantum Electronics, IEEE Journal of
(Volume:10
,
Issue:
3
)
Date of Publication: May-June 2004
- Page(s):
- 440 - 444
- ISSN :
- 1077-260X
- INSPEC Accession Number:
- 8083924
- Digital Object Identifier :
- 10.1109/JSTQE.2004.829208
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 16 August 2004
- Issue Date :
- May-June 2004
- Sponsored by :
- IEEE Photonics Society
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