Referenced Items are not available for this document.
We present application of low coherence optical interferometry to measurement of highly warped samples(characterized by bow of up to 8mm and beyond on 300mm diameter wafers).
Published in:
Electronics Manufacturing Technology Symposium, 2004. IEEE/CPMT/SEMI 29th International
Date of Conference: July 14-16, 2004
- Page(s):
- 323 - 325
- ISSN :
- 1089-8190
- Print ISBN:
- 0-7803-8582-9
- INSPEC Accession Number:
- 8118488
- Digital Object Identifier :
- 10.1109/IEMT.2004.1321683
- Product Type:
- Conference Publications
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