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Optical deflection measurement for characterization of microelectromechanical systems (MEMS)

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5 Author(s)
Firebaugh, S.L. ; Electr. Eng. Dept., United States Naval Acad., Annapolis, MD, USA ; Charles, H.K., Jr. ; Edwards, Richard L. ; Keeney, Allen C.
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Nonintrusive measurement of small out-of-plane motions of microscale structures is critical to the development of microelectromechanical systems (MEMS). This paper presents a low-cost deflection measurement system for MEMS structures based on a fiber optic displacement sensor. The system is demonstrated in the characterization of a microwave switch. The deflection system had a demonstrated sensitivity of 290±32 μV/nm over a deflection range of 100 μm. The calibration and linearity of the system are described, and the static and dynamic performance is compared to more elaborate systems.

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Instrumentation and Measurement, IEEE Transactions on  (Volume:53 ,  Issue: 4 )