By Topic

Wafer fab cycle forecast under changing loading situations

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
Beeg, T. ; Infineon Technol. AG, Dresden, Germany

This paper describes a successfully applied method to predict future wafer fab cycle time under different fab loading situations. To meet customer demands, a confident cycle time commitment is necessary especially if fab loading will significantly increase. To handle this complex forecast, an easy to use methodology was been developed and successfully used during a+15% fab loading ramp up project. Based on individual work center operating curves, a quite realistic detailed cycle time prognosis for an existing wafer fab was done.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004