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Analysis of wafer process duration for ab initio calculation of capacity, throughput and bottleneck equipments in a wafer fab

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4 Author(s)
Etzel, H. ; Flensburg Univ. of Appl. Sci., Germany ; Staudt, P. ; Oertel, H. ; Dudde, R.

The production flow in a mid sized state of the art wafer fab has been used for the statistical analysis. In this paper, we report on an evaluation of wafer booking times for an analysis of equipment utilization and wafer fab capacity which turned out to be an easy tool to provide actual information on process steps and overall fab utilization and capacity.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004