By Topic

Real time dispatcher on demand

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

1 Author(s)
S. A. Leslie ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA

This paper describes a method of improving performance by directing an AMHS (Automated Material Handling System) within a modern Semiconductor Fabricator (FAB). The required components described here are: Brooks Automation Real Time Dispatcher (RTD), a Manufacturing Execution System (MES) with AMHS and finally a simple integration program code named "Tickle" because it causes other systems to act. These components deliver work in progress (WIP) by "pushing" lots where they are needed next without operator intervention. This is the first use of RTD to control an AMHS.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004