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Real time dispatcher on demand

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1 Author(s)
Leslie, S.A. ; Microelectron. Div., IBM Corp., Essex Junction, VT, USA

This paper describes a method of improving performance by directing an AMHS (Automated Material Handling System) within a modern Semiconductor Fabricator (FAB). The required components described here are: Brooks Automation Real Time Dispatcher (RTD), a Manufacturing Execution System (MES) with AMHS and finally a simple integration program code named "Tickle" because it causes other systems to act. These components deliver work in progress (WIP) by "pushing" lots where they are needed next without operator intervention. This is the first use of RTD to control an AMHS.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004