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Interrupt reduction by triggering of maintenance activities using APC machine alarm analysis

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1 Author(s)
Bruggemann, M. ; Infineon Technol. AG, Munich, Germany

As a part of the APC project at Infineon, an automated machine-alarm and -event analysis tool was developed to analyze machine- and process problems. This software is used in the high volume fabs in Munich, Regensburg, Villach, Dresden and Richmond. It is a built-in part in the "APC-Trend" software, which shows trends and systematic deviations of machine and process parameters like temperature, pressure, gas flows and so on. This new tool gives excellent information about machine-problems and the relationship to product logistics, thereby flagging potentially bad lots and wafers for inspection and further analysis.

Published in:

Advanced Semiconductor Manufacturing, 2004. ASMC '04. IEEE Conference and Workshop

Date of Conference:

4-6 May 2004