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This paper reports a micromachined Pirani gauge with dual heat sinks, which can be integrated with MEMS devices inside a vacuum package to monitor long-term pressure changes and stability inside the package. The gauge utilizes small gaps (<1 μm) between its heater and two thermal sinks to obtain large dynamic range (20 mTorr to 2 Torr) and high sensitivity (3.5×105 (K/W)/Torr). This gauge can resolve leak rates inside a small sealed cavity as low as 3×10-16 cm3/sec.
Date of Conference: 2004