Referenced Items are not available for this document.
This paper reports a micromachined Pirani gauge with dual heat sinks, which can be integrated with MEMS devices inside a vacuum package to monitor long-term pressure changes and stability inside the package. The gauge utilizes small gaps (<1 μm) between its heater and two thermal sinks to obtain large dynamic range (20 mTorr to 2 Torr) and high sensitivity (3.5×105 (K/W)/Torr). This gauge can resolve leak rates inside a small sealed cavity as low as 3×10-16 cm3/sec.
Published in:
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Date of Conference: 2004
- Page(s):
- 532 - 535
- Print ISBN:
- 0-7803-8265-X
- INSPEC Accession Number:
- 8032524
- Digital Object Identifier :
- 10.1109/MEMS.2004.1290639
- Product Type:
- Conference Publications
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