By Topic

Plastic micropumps using ferrofluid and magnetic membrane actuation

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

2 Author(s)
Yamahata, C. ; Inst. of Microelectron. & Microsyst., Swiss Fed. Inst. of Technol. Lausanne, Switzerland ; Gijs, M.A.M.

This paper presents a simple and low-cost prototyping technology for the realization of integrated micropumps in polymethylmethacrylate (PMMA). The three-dimensional (3D) micropumps consist of stacks of structured PMMA layers, which are either realised with precision milling tools for the more complex parts, or fabricated using the powder blasting technique for channel-type structures. We integrate silicone membranes into the chip to realize check-valves or use dynamic diffuser valves. We use two different types of magnetic actuation external to the micropump: (i) an external magnet displaces a ferrofluid liquid plug that plays the role of a piston in a channel; (ii) an external coil actuates an integrated magnetic membrane, consisting of NdFeB magnetic powder in a polydimethylsiloxane (PDMS) matrix.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004