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Electrostatically-actuated micro cantilevers for electro-mechanical measurement of single-walled carbon nanotubes grown by catalytic CVD

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5 Author(s)
Hoshino, K. ; Dept. of Mech.-Inf., Tokyo Univ., Japan ; Murakami, Y. ; Maruyama, S. ; Matsumoto, K.
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We have build a system for real-time in-situ measurement of electromechanical properties of single-walled carbon nanotubes (SWNTs) growing between electrostatically actuated silicon cantilevers faced each other with a micrometer-order gap. Our catalytic CVD method using ethanol as a carbon source was employed along with a newly developed technique that can synthesize SWNTs directly on the surface of Si substrate at the CVD temperature of as low as 650°C. SWNTs were successfully grown between the 10-micrometer gap of the measuring probes. Mechanical properties of the probing cantilevers under the CVD condition were then measured to assess the feasibility of real-time measurement of SWNT growth.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004