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Single-walled carbon nanotube probes for AFM imaging

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4 Author(s)
Lian Zhang ; Molecular Nanosyst., USA ; Ata, E. ; Minne, S.C. ; Hough, P.

This paper discusses fabrication and characterization of single-walled carbon nanotube (SWNT) AFM probes. By selectively deposit catalytic nanoparticles onto commercial AFM probes with silicon tips, we are able to grow SWNTs on the wafer scale, with 30-50% usable probe yield. We also studied shortening of carbon nanotubes to achieve proper mechanical strength required for AFM application. Comparison shows that SWNT probes consistently reveal 50-100% more surface features than silicon probes. These probes are also successfully used in DNA imaging in a liquid solution.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference:

2004