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Silicon carbide membrane relative humidity sensor with aluminium electrodes

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5 Author(s)
Connolly, E.J. ; DIMES, Delft Univ. of Technol., Netherlands ; Pham, H.T.M. ; Groeneweg, J. ; Sarro, P.M.
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We report a new RH sensor based on a porous SiC membrane and Al electrodes. The RESET function has also been successfully tested. Using SiC allows us to fabricate sensors that can withstand harsh environments, while using Al for the electrodes makes the fabrication process much more cleanroom friendly. SEM images were used to examine the fabricated devices. The response of our sensors to RH between 10% and 90% RH, as well as the effects on the response after being exposed to extreme environments such as the outlet of a car exhaust, an environmental oven operating at 85°C & 85%RH for 24hours, and an ammonia atmosphere for ∼5 days, is discussed. It is seen that our sensors survived the exposures, with only small decrease in sensitivity after ammonia exposure.

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Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

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