By Topic

An AFM-based device for in-situ characterization of nano-wear

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$33 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Deladi, S. ; MESA Res. Inst., Twente Univ., Enschede, Netherlands ; Berenschot, J.W. ; de Boer, M.J. ; Krijnen, G.J.M.
more authors

An innovative tool has been developed to investigate in-situ monitoring of surface modification, which can be used in standard Atomic Force Microscopes (AFM). The device enables detection of topography modification on nanometer scale lateral- and subnanometer vertical resolution, which is important for reliability studies of MEMS and NEMS, where small moving parts may contact each other leading to wear. The novelty of the device is that surface modification (e.g. wear) is generated in a controlled way with a multifunctional cantilever and it is identified in-situ, the detection and the surface modification being decoupled but embedded in one and the same device.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference: