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High fill-factor two-axis analog micromirror array for 1×N2 wavelength-selective switches

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3 Author(s)
Jui-Che Tsai ; Dept. of Electr. Eng., California Univ., Los Angeles, CA, USA ; S. Huang ; M. C. Wu

We report on a two-axis analog micromirror array with high fill factor (96%) and large mechanical scan angles (±4.4° and ±3.4°). To our knowledge, this is the highest linear fill factor ever reported for two-axis analog micromirror arrays. A 1×14 wavelength-selective switch (WSS) was also demonstrated using the mirror array. This is the largest number of port count ever reported for WSS. The fiber-to-fiber insertion loss is 8.2 dB. Switching of <2 msec has been achieved.

Published in:

Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)

Date of Conference: