Referenced Items are not available for this document.
In order to make new mechanical watch movements possible as well as adding new functions to wristwatches, MEMS, UV-LIGA, and silicon micromachining have become indispensable technologies in the watch industries. Examples presented here are deep reactive ion etching (DRIE) of silicon gears, SU-8 based UV-LIGA and MEMS based pressure and magnetic sensors. This article provides a brief overview of some recent commercialized technologies in Switzerland.
Published in:
Micro Electro Mechanical Systems, 2004. 17th IEEE International Conference on. (MEMS)
Date of Conference: 2004
- Page(s):
- 1 - 4
- Print ISBN:
- 0-7803-8265-X
- INSPEC Accession Number:
- 8032401
- Digital Object Identifier :
- 10.1109/MEMS.2004.1290507
- Product Type:
- Conference Publications
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