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Accelerated ageing of micro-hotplates for gas sensing applications

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3 Author(s)
Briand, D. ; Inst. of Microtechnology, Neuchatel Univ., Switzerland ; Tomassone, G.-M. ; de Rooij, N.F.

We report on the reliability of micro-hotplates used in gas sensing applications. Accelerated ageing of the micro-hotplates was obtained using a burn-in test. Devices with different designs were self-heated at higher temperatures than their typical operating temperature until failure. Results on micro-hotplates with only the heater, the heater and electrodes, and coated with the gas-sensitive coating are presented. Electromigration and breaking of the membrane were two failure modes observed, and for some testing conditions were linked together. The electrodes had a slight effect on the maximum power before failure and on the membrane deformation, but had an influence on the micro-hotplates lifetime. The addition of the gas-sensitive coating provided a longer lifetime.

Published in:

Sensors, 2003. Proceedings of IEEE  (Volume:2 )

Date of Conference:

22-24 Oct. 2003