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MISiCFET sensor arrays for on line diagnosis

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12 Author(s)
A. L. Spetz ; S-SENCE, Linkoping Univ., Sweden ; H. Wingbrant ; M. Andersson ; M. Lofdahl
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Catalytic Metal Insulator Silicon Carbide Field Effect Transistor (MISiCFETs) sensors can be processed as a sensor array on a SIC-chip. Different selectivity of the sensors is achieved by the use of different combinations of catalytic metals and insulators. The response patterns are used to evaluate for example different states of a combustion (low/high emissions, efficient/less efficient combustion) or monitoring different components in the exhausts from the combustion.

Published in:

Sensors, 2003. Proceedings of IEEE  (Volume:2 )

Date of Conference:

22-24 Oct. 2003