Biological element detection sensor application of micromachined PZT thick film cantilever

A highly sensitive monolithic cantilever sensor for mass detection has been successfully fabricated with PZT (52/48) thick films prepared on Pt/TiO/sub 2//YSZ/SiO/sub 2//Si substrate by new hybrid method based on the screen-printing. The shorter cantilever is more sensitive for mass change and can defect ng level mass change in aqueous environment even though the sensitivity of cantilever decreases due to viscous damping. Also, the capability of thick film cantilever for biosensor application has been verified. It is quantitatively investigated that the resonance frequency change of cantilever can be affected from the biological element binding such as streptavidin-biotin binding and prostate specific antigen (PSA)-antibody interaction on a PSA antibody immobilized Au surface.