Cart (Loading....) | Create Account
Close category search window

Mixed In/Fe oxide thin films for ppb-level ozone sensing

Sign In

Cookies must be enabled to login.After enabling cookies , please use refresh or reload or ctrl+f5 on the browser for the login options.

Formats Non-Member Member
$31 $13
Learn how you can qualify for the best price for this item!
Become an IEEE Member or Subscribe to
IEEE Xplore for exclusive pricing!
close button

puzzle piece

IEEE membership options for an individual and IEEE Xplore subscriptions for an organization offer the most affordable access to essential journal articles, conference papers, standards, eBooks, and eLearning courses.

Learn more about:

IEEE membership

IEEE Xplore subscriptions

5 Author(s)
Baratto, C. ; Dept. of Chem. & Phys., Brescia Univ., Italy ; Ferroni, M. ; Benedetti, A. ; Faglia, G.
more authors

For the purpose of ozone detection, thin-film gas-sensor based on mixed In/Fe oxides were developed by sputtering and thermal treatment according to the RGTO technique. Preparation of the film was optimized by varying the In-Fe ratio in the sputtering target and electron microscopy analyses were carried out in order to correlate the microstructural features of the nanosized layers with the electrical properties. The nanostructured films exhibit homogeneous morphology and high degree of porosity. Annealing resulted in higher stoichiometry but did not promoted exaggerated coarsening for the grains. A mixed In2O3 and Fe2O3 composition was determined by electron diffraction. The effect of iron is to decrease working temperature for optimal ozone detection down to 250°C. The sensing layers with higher iron content are capable to detect 30 ppb of O3 with a relative response ΔG/G of 3.5. Response towards CO, NO2, ethanol and methanol was also investigated. A good response towards 0.1 ppm of NO2 was observed at 250°C. Also in this case the best performances are observed for the film with higher iron content.

Published in:

Sensors, 2003. Proceedings of IEEE  (Volume:2 )

Date of Conference:

22-24 Oct. 2003

Need Help?

IEEE Advancing Technology for Humanity About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies

A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2014 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.