Referenced Items are not available for this document.
At wavelength measurement is important for EUVL PO (Extreme Ultraviolet Lithograph Project Optics). Because the wavelength of EUVL is very short, it is difficult to use normal interferometers for this. We suggest a DLSI (Double grating lateral shearing interferometer) in which the influence of the light source can be canceled. Moreover, in DLSI, the interferogram is one-color.
Published in:
Microprocesses and Nanotechnology Conference, 2003. Digest of Papers. 2003 International
Date of Conference: 29-31 Oct. 2003
- Page(s):
- 290 - 291
- Print ISBN:
- 4-89114-040-2
- INSPEC Accession Number:
- 7954065
- Digital Object Identifier :
- 10.1109/IMNC.2003.1268760
- Product Type:
- Conference Publications
About IEEE Xplore | Contact | Help | Terms of Use | Nondiscrimination Policy | Site Map | Privacy & Opting Out of Cookies
A not-for-profit organization, IEEE is the world's largest professional association for the advancement of technology.
© Copyright 2013 IEEE - All rights reserved. Use of this web site signifies your agreement to the terms and conditions.
