Referenced Items are not available for this document.
Light guide, a novel dielectric structure consisting of PE-Oxide and FSG-Oxide, has been developed to reduce crosstalk in 0.18-μm CMOS image sensor technology. Due to the difference in refraction index (1.46 for PE-Oxide and 1.435 for FSG-Oxide), major part of the incident light can be totally reflected at the interface of PE-Oxide/FSG-Oxide, as the incidence angle is larger than total reflection angle. With this light guide, the pixel sensing capability can be enhanced and to reduce pixel crosstalk. Small pixels with pitch 3.0-μm and 4.0-μm have been characterized and examined. In 3.0-μm pixel, optical crosstalk achieves 30% reduction for incidence angle of light at 10°.
Published in:
Electron Device Letters, IEEE
(Volume:25
,
Issue:
1
)
Date of Publication: Jan. 2004
- Page(s):
- 22 - 24
- ISSN :
- 0741-3106
- INSPEC Accession Number:
- 7910788
- Digital Object Identifier :
- 10.1109/LED.2003.821597
- Product Type:
- Journals & Magazines
- Date of Current Version :
- 06 February 2004
- Issue Date :
- Jan. 2004
- Sponsored by :
- IEEE Electron Devices Society
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