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Double-gate devices will enable the continuation of CMOS scaling after conventional scaling has stalled. DGCMOS/FinFET technology offers a tactical solution to the gate dielectric barrier and a strategic path for silicon scaling to the point where only atomic fluctuations halt further progress. The conventional nature of the processes required to fabricate these structures has enabled rapid experimental progress in just a few years. Fully integrated CMOS circuits have been demonstrated in a 180 nm foundry-compatible process, and methods for mapping conventional, planar CMOS product designs to FinFET have been developed. For both low-power and high-performance applications, DGCMOS-FinFET offers a most promising direction for continued progress in VLSI.