Probing of Cu presence at Ta-SiO/sub 2/ interfaces by second harmonic generation measurement

In this paper, we have demonstrated for the first time that optical second harmonic generation (SHG) measurement can be used to probe Cu presence at the Ta-SiO/sub 2/ interfaces. We report here the details of our experimental procedures and investigation results. This technique shows tremendous potential in surface and interface microanalysis for Cu presence at these regions.