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Probing of Cu presence at Ta-SiO2 interfaces by second harmonic generation measurement

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5 Author(s)
Tey, S.H. ; Sch. of Electr. & Electron. Eng., Nanyang Technol. Univ., Singapore ; Seebauer, E.G. ; Prasad, K. ; Tee, K.C.
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In this paper, we have demonstrated for the first time that optical second harmonic generation (SHG) measurement can be used to probe Cu presence at the Ta-SiO2 interfaces. We report here the details of our experimental procedures and investigation results. This technique shows tremendous potential in surface and interface microanalysis for Cu presence at these regions.

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002