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Electric conductimetric sensor with a thin-layer structure for moisture analysis

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4 Author(s)
Mitsubayashi, K. ; Dept. of Human & Inf. Sci., Tokai Univ., Kanagawa, Japan ; Miyoshi, Y. ; Takeuchi, T. ; Karube, I.

An electric conductimetric sensor (thickness: 80 μm) constructed in a sandwich configuration with a hydrophilic poly-tetrafluoroethylene membrane placed between two gold deposited layers was evaluated for use as a moisture sensor. The humidity level was measured by electrical conductivity of the device using the Multi-frequency LCR-meter at frequencies ranging from 100 Hz to 100 k Hz, the device was calibrated at 100 Hz against the moisture air over the range of 30-85 % RH, which includes normal humidity level in the atmosphere and physiologic air such as breath and sweating. The response sensitivity of the conductimetric device was extremely high (i.e. less than 1 sec. for conductivity shift between humid air of 80 % RH and dried air of -60 °C dew point) even for recovery to dried air. The sensor performance was reproducible over multiple measurements, showing the highly reproducibility with a coefficient of variation of 1.77 % (n = 5).

Published in:

Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on

Date of Conference:

11-13 Dec. 2002