A methodology which enables the calculation of threading dislocation configurations for arbitrary multi-layered structures is presented. This methodology includes strain and employs a force-balance approach to attain the equilibrium configuration. This allows technologically important properties of multi-layered structures, such as critical thickness, to be determined.
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Optoelectronic and Microelectronic Materials and Devices, 2002 Conference on
Date of Conference: 11-13 Dec. 2002